H-840.G2IHP type high-precision hexapod stage
Based on customer feedback, we have improved the driving precision of the Hexapod! It now enables step movements of 40 nm on the XY axis and 20 nm on the Z axis.
We have been providing hexapod stages for over 20 years, and based on customer feedback, we have released a hexapod with enhanced drive precision! It enables step movements of 40 nm on the XY axis and 20 nm on the Z axis. It can meet the highest demands for alignment and positioning applications in production and measurement technologies. <Specifications> - Drive Axes: 6 axes - Travel Range: XY = ±50mm, Z = ±25mm, θxθy = ±15 degrees, θz = ±30 degrees - Minimum Movement: XY = 40nm, Z = 20nm, θxθy = 0.2µrad, θz = 0.4µrad - Maximum Speed: 2.5mm/second, 30mrad/second - Load Capacity: 40Kg (horizontal) - Arbitrary rotation center setting For more details, please contact us or refer to the catalog.
- Company：ピーアイ・ジャパン
- Price：Other
